LMT-5000 Laser Micromachining System with 12" Stages
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LMT-5000 Laser Micromachining System with 12" Stages |
The microfabrication laboratory at PNNL consists of:
The laser micromachining system is capable of fabricating microstructures (channels, holes, patterns) as small as 5 microns in plastics, metals, semiconductors, glasses, and ceramics. This process can achieve aspect ratios of 10:1. Presently this system is being used to fabricate microscale heat exchangers, engineered micro membranes, and micro-scale molds for the electroplating system. Metals are electrodeposited into the molds to form metallic microscale components similar to the LIGA fabrication process. Microscale chemical sensors and microchannel heat exchangers are fabricated by bulk silicon micromachining. The chemical sensors have eight stages, including micropumps, mixing channels and reaction channels. The photolithographic patterning facility uses photomasks and photoresist technology to pattern structures as small as 2 microns. A direct write facility is used to fabricate exposure masks and directly pattern photoresist. The features are then formed either by ion milling or chemical etching processes. Microscale heat pumps, heat exchangers, combustors, and solvent extraction units are fabricated by a patented lamination process. Aspect ratios greater than 100 can be achieved by this process. Coating facilities are available to attach electrodes, catalysts, insulating coatings, reflective coatings, photocatalytic coatings, and resistive heater coatings. The electrochemcial micromachining process is being developed to inexpensively fabricate micro and meso scale components in metals and coatings.
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