Mesopump Development

Pumps and compressors are essential components for integrating MICRO-CATS. These must be of commensurate scale with the microtechnology components. We have established capabilities in the design and development of diaphragm pumps for the operational envelope of 0 - 100ml/min flow rate and 0.1 - 1bar. There were no commercially available pumps in this regime so we developed the capability to meet the requirements for our MICRO-CATS applications.

The approach of scaling of conventional dynamic machines results in unacceptably low efficiencies due to high parasitic and clearance losses and seal performance. Microscopic pumps (flow < 1mL/min) produced by silicon micromachining and LIGA nano-technology may eventually prove to be a cost-effective alternative but they are not presently available. Furthermore, the manifolding of such pumps to produce mesoscopic flow rates has not been demonstrated. Therefore, we design and develop diaphragm-type pumps because they scale relatively well to this size range. Also they can be powered with linear electromagnetic drivers that have good power density. Furthermore, with this design dynamic seals can be avoided; this eliminates a source of risk, cost and losses. Finally, diaphragm pumps can be ganged in parallel to increase output and reduce pressure fluctuations.

The current Mesoscopic Pump fits in a 40mm cube. It operates on 0 - 4 VDC. Frequency of the pump is variable from 3-32 Hz. The design output is about 1mL/min/Hz. The pump was designed in partnerships with others who have the capacity to design and produce all the components:

The valves are a laminated diffusion-bonded assembly of laser-cut or EDM parts.
The metallic diaphragm is hydroformed on a single die, and heat treated to increase fatigue life.
The linear motor is a simple coil-and-core construction on a small scale.
The motor controller is a few compact devices, which may be integrated into one custom IC.
The housing parts are conventionally machined. The gaskets are die cut.